JPS632148U - - Google Patents
Info
- Publication number
- JPS632148U JPS632148U JP9622886U JP9622886U JPS632148U JP S632148 U JPS632148 U JP S632148U JP 9622886 U JP9622886 U JP 9622886U JP 9622886 U JP9622886 U JP 9622886U JP S632148 U JPS632148 U JP S632148U
- Authority
- JP
- Japan
- Prior art keywords
- illumination means
- inspected
- reflected light
- illuminates
- light generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims description 2
- 239000011889 copper foil Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9622886U JPS632148U (en]) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9622886U JPS632148U (en]) | 1986-06-24 | 1986-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS632148U true JPS632148U (en]) | 1988-01-08 |
Family
ID=30961735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9622886U Pending JPS632148U (en]) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS632148U (en]) |
-
1986
- 1986-06-24 JP JP9622886U patent/JPS632148U/ja active Pending
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